General lab practice

• How to ship lithography samples. This is not the no-brainer you probably think it is.
• Process Guidelines: A manual of good lab practice for lithography. How to store and dispense resist, use the spinner, etc.
• Waste Disposal in the CNTech cleanrooms
• Acid Disposal in the PCR Acid Station Only if you really must. It’s better to neutralize it with waste KOH from Wally. See Quinn.
  

Photoresists and lithography

• Some photoresist recipes.
• An archive of some process recipes.
• PMMA spin speed curves: PMMA496K.OPJ
• A few spin speed curves for photoresists.
• Using the optical microscope for resist exposures How to expose SC1827 on the Nikon microscope in Quinn’s office.

Etching

• Plating Base Etch for Au on Cr   This has not been updated for the KTI Cr etch we now use, which may not crosslink photoresist.

Beamlines

• USING THE CALORIMETER TO MEASURE FLUX IN ES-1
• MEMS Beam Line Operation
  

Other equpiment

• The SRC Little Evaporator
• Printing Large Posters on the SRC Vault Plotter
• Transfilling the Liquid Nitrogen Tanks
• Collecting SVG Track Hotplate Statistics
• SVG Track Preventative Maintenance

Chemistry

• No. 1133 Formvar solution

Mask fabrication:

• Plating Base Etch for Au on Cr   This has not been updated for the KTI Cr etch we now use, which may not crosslink photoresist.
• Outline of SiN processes
• Old Mask Fabrication Guidelines