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Equipment and Facilities

CAUTION: The instructions and manuals must be used with discretion. Reading a manual is no replacement for proper training with an experienced user. Some manuals may be out of date or may not reflect recent equipment modifications; it is the user’s responsibility to figure this out. Some of the more abbreviated instruction sets assume familiarity with the tool. When in doubt, ask.

Tools at CNTech:

Biological Applications

Tool

Description

Location

Manual

Contact

thumbnail photo of the second generation Maskless Array Synthesizer

Maskless array synthesizer

Creates DNA sequences using UV light

CNTech biotech lab

 

John Wallace

  Automated gene synthesizer Creates long sequences of DNA using UV light Being assembled in parts at CNTech biotech lab   Jim Kaysen
  Applied Precision ArrayWoRx chip scanner Scans DNA microarrays and produces images with 2 micron resolution CNTech biotech lab   Matt Rodesch

thumbnail photo of the Eclipse E800

Eclipse E800 Optical/fluorescence microscope CNTech biotech lab E800 Specs [PDF] Changhan Kim

 

Automated microarray hybridization unit

Hybridizes probes to array and washes array so it is ready for scanning

CNTech biotech lab

 

Matt Rodesch

 

Photon Exposure see also BEAMLINES

Tool

Description

Location

Instructions and Manuals

Contacts

thumbnail photo of the JMAR 5C stepper

JMAR 5C stepper

X-ray stepper / aligner

CNTech Cleanroom

See Quinn

Quinn Leonard

Dan Malueg

thumbnail photo of beamline coming into CNTech clean room

MEMS beamline

X-ray endstation with programmable scanning stage

SRC vault

MEMS Beamline Operation [PDF]

Original MEMS user manual

Quinn Leonard

John Wallace

Focused spot beamline

High-flux, small-field beamline with a scanning stage, mostly for damage studies.

CNTech Cleanroom

 

John Wallace

Chemistry beamline

X-ray beamline with simple optics; formerly used for outgassing studies. Not currently in use.

CNTech Cleanroom

   

ES-1

X-ray endstation with programmable scanning stage

SRC vault

ES-1 operation outline

ES-1 Operation Manual (draft)

Quinn Leonard

John Wallace

EUV beamline

Lloyd’s mirror and transmission grating lithography, using high flux EUV light from an Aladdin undulator.

SRC vault

These manuals are partly obsolete! See John.

Mono beamline procedure [PDF]

Direct beamline procedure [PDF]

EUV experimental setup [PDF]

John Wallace

Dan Malueg

Oriel contact printer

Printer for exposing optical resists through Cr/glass masks using a mercury lamp.

CNTech Cleanroom

 

Quinn Leonard

 

Electron Beam Exposure

Tool

Description

Location

Manual

Contact

JEOL JBX-5D2-U E-Beam tool

E-beam page at the main CNTech site

Specifications

CNTech Annex cleanroom

 

Scott Dhuey

Nabity

Third-party add-on for programmed writings with SEM beam

Annex cleanroom

 

Scott Dhuey

 

Metrology

Tool

Description

Location

Manual

Contact

Alpha Step

Surface profilometer

CNTech metrology cleanroom

 

Quinn Leonard

This tool is temporarily down.

Film Metrics

Optical film thickness measurement

CNTech metrology cleanroom

 

Quinn Leonard

Nikon

Optical microscope with digital image capture. Image can be transferred by USB or network. Magnification to 100x.

CNTech metrology cleanroom

 

Quinn Leonard

 

Perkin-Elmer 5900

Dissolution rate monitor

CNTech metrology cleanroom

   

Davidson

Interferometer

CNTech beamline cleanroom

 

Quinn Leonard

Leo SEM

Field-emission scanning electron microscope

CNTech Annex cleanroom

 

Scott Dhuey

Veeco AFM

Atomic force microscope with thermal probe

CNTech Annex cleanroom

 

Scott Dhuey

 

Rudolf

Elipsometer

Campus - polymer lab

   
 

On-Line Technologies

FTIR system

CNTech metrology cleanroom    

Met One

Particle counter

CNTech metrology cleanroom    
 

Cary

Spectrophotometer

CNTech Annex    
 

Goniometer

Contact angle measurement

CNTech beamline cleanroom    
 

Inspection

Tool

Description

Location

Manual

Contact

Nikon

Optical microscope with digital image capture. Image can be transferred by USB or network. Magnification to 100x.

CNTech metrology cleanroom

 

Quinn Leonard

 

Nikon

Optical microscope

Quinn’s office at CNTech

 

Quinn Leonard

Free-arm microscope

 

CNTech beamline cleanroom

 

Quinn Leonard

 

Yellow light

Particle detection lamp and box. CNTech beamline cleanroom  

Quinn Leonard

 

Analysis

Tool

Description

Location

Manual

Contact

Tracor Northern EDS

Energy-dispersive spectroscopy system on the LEO SEM.

CNTech annex cleanroom

 

Scott Dhuey

 

FTIR

Infrared chemical bond analysis CNTech metrology cleanroom    
 

Perkin-Elmer DRM

Film thickness dissoluation rate tool CNTech metrology cleanroom   Quinn Leonard
 

Rudolph

Elipsometer

Campus - polymer lab   Quinn Leonard
           
           
 

Deposition

Tool

Description

Location

Manual

Contact

 

Hummer

Metal deposition for SEM samples CNTech annex

Hummer manual

Hummer Gold Deposition Rate

 
 

Au plating cell

Gold electroplating for x-ray mask structures CNTech annex   Scott Dhuey
 

SRC evaporator

Metal deposition SCR cleanroom    
 

InfiCon

Measures film thickness and deposition rate during deposition CNTech annex/SRC cleanroom    
 

MDC Sputterer

Metal deposition CNTech annex   Anphong Ho
 

Etch

Tool

Description

Location

Manual

Contact

 

PlasmaTherrm RIE

Reactive ion etching CNTech annex   Scott Dhuey
 

Wet processes

  CNTech process cleanroom    
 

Phantom I

 

WCAM plasma bay

   
 

Phantom II

 

WCAM plasma bay

   
 

Minilock

 

WCAM plasma bay

   
 

General Processing

Tool

Description

Location

Manual

Contact

 

Wet bench

Processes using acids, bases and developers CNTech process cleanroom    
 

Nitrogen cabinet

Dry, clean sample storage CNTech process cleanroom   Quinn Leonard
 

Ultrasonic bath

Sample cleaning CNTech process cleanroom/annex    
 

Analytical scale

Weighing materials CNTech process cleanroom    
 

Handheld DVM

Electrical measurements      
 

CEE 1000

Vacuum hotplate

CNTech process cleanroom    
 

CEE 1000

Vacuum hotplate

CNTech process cleanroom    
 

CEE 1100

Programmable vacuum hotplate

CNTech process cleanroom    
 

Solitec

Resist spinner

CNTech process cleanroom    
 

Karl Suss

Resist spinner

CNTech process cleanroom    
 

SVG/Site Services

Wafer track

CNTech process cleanroom    
 

Semitool

Spin-rinse dryer, 5”

CNTech process cleanroom    
 

YES

HMDS vacuum prime oven

CNTech process cleanroom    
 

Verteq

Spin-rinse dryer, 4”

CNTech process cleanroom    
  Homebuilt anodic bonding system

Bonding silicon substrates to glass

CNTech annex    
 

Wally KOH etch station

Si etch, mostly for mask blank fabrication

CNTech annex   Quinn Leonard
 

Wet bench

Electroplating and etch cleanup

Annex

   
 

Kenmore

Cleanroom laundry washer and dryer

Annex

  Laurel Washa
 

SRC wet bench

       
 

SRC US baths 1

       
 

SRC US baths 2

       

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  last updated: August 30, 2005
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