Biological Applications |
Tool |
Description |
Location |
Manual |
Contact |
|
Maskless array synthesizer |
Creates DNA sequences using UV light
|
CNTech biotech lab |
|
John Wallace |
| |
Automated gene synthesizer |
Creates long sequences of DNA using UV light |
Being assembled in parts at CNTech biotech lab |
|
Jim Kaysen |
| |
Applied Precision ArrayWoRx chip scanner |
Scans DNA microarrays and produces images with 2 micron resolution |
CNTech biotech lab |
|
Matt Rodesch |
|
Eclipse E800 |
Optical/fluorescence microscope |
CNTech biotech lab |
E800 Specs [PDF] |
Changhan Kim |
|
Automated microarray hybridization unit |
Hybridizes probes to array and washes array so it is ready for scanning |
CNTech biotech lab |
|
Matt Rodesch |
| |
Photon
Exposure see also BEAMLINES |
Tool |
Description |
Location |
Instructions
and Manuals |
Contacts |
 |
JMAR
5C stepper |
X-ray
stepper / aligner |
CNTech
Cleanroom |
See
Quinn |
Quinn
Leonard
Dan
Malueg |
 |
MEMS
beamline |
X-ray
endstation with programmable scanning
stage |
SRC
vault |
MEMS
Beamline Operation [PDF]
Original
MEMS user manual |
Quinn
Leonard
John
Wallace |
 |
Focused
spot beamline |
High-flux,
small-field beamline with a scanning
stage, mostly for damage studies. |
CNTech Cleanroom
|
|
John
Wallace |
 |
Chemistry
beamline |
X-ray
beamline with simple optics; formerly
used for outgassing studies. Not
currently in use. |
CNTech
Cleanroom |
|
|
 |
ES-1 |
X-ray
endstation with programmable scanning
stage |
SRC
vault |
ES-1
operation outline
ES-1
Operation Manual (draft) |
Quinn
Leonard
John
Wallace |
 |
EUV
beamline |
Lloyd’s
mirror and transmission grating
lithography, using high flux EUV
light from an Aladdin undulator. |
SRC
vault |
These
manuals are partly obsolete! See
John.
Mono
beamline procedure [PDF]
Direct
beamline procedure [PDF]
EUV
experimental setup [PDF] |
John
Wallace
Dan
Malueg |
 |
Oriel
contact printer |
Printer
for exposing optical resists through
Cr/glass masks using a mercury
lamp. |
CNTech
Cleanroom |
|
Quinn
Leonard |
| |
Electron
Beam Exposure |
Tool |
Description |
Location |
Manual |
Contact |
 |
JEOL
JBX-5D2-U E-Beam tool |
E-beam
page at the main CNTech site
Specifications |
CNTech
Annex cleanroom |
|
Scott
Dhuey |
 |
Nabity |
Third-party
add-on for programmed writings
with SEM beam |
Annex
cleanroom |
|
Scott
Dhuey |
| |
Metrology |
Tool |
Description |
Location |
Manual |
Contact |
 |
Alpha
Step |
Surface
profilometer |
CNTech
metrology cleanroom |
|
Quinn
Leonard
This tool is temporarily
down. |
 |
Film
Metrics |
Optical
film thickness measurement |
CNTech
metrology cleanroom |
|
Quinn
Leonard |
 |
Nikon |
Optical
microscope with digital image capture.
Image can be transferred by USB
or network. Magnification to 100x. |
CNTech
metrology cleanroom |
|
Quinn
Leonard |
| |
Perkin-Elmer
5900 |
Dissolution
rate monitor |
CNTech
metrology cleanroom |
|
|
 |
Davidson |
Interferometer |
CNTech
beamline cleanroom |
|
Quinn
Leonard |
 |
Leo
SEM |
Field-emission
scanning electron microscope |
CNTech
Annex cleanroom |
|
Scott
Dhuey |
 |
Veeco
AFM |
Atomic
force microscope with thermal probe |
CNTech
Annex cleanroom |
|
Scott
Dhuey |
| |
Rudolf |
Elipsometer |
Campus - polymer lab |
|
|
| |
On-Line
Technologies |
FTIR
system |
CNTech metrology cleanroom |
|
|
 |
Met
One |
Particle
counter |
CNTech metrology cleanroom |
|
|
| |
Cary |
Spectrophotometer |
CNTech Annex |
|
|
| |
Goniometer |
Contact
angle measurement |
CNTech beamline cleanroom |
|
|
| |
Inspection |
Tool |
Description |
Location |
Manual |
Contact |
 |
Nikon |
Optical
microscope with digital image capture.
Image can be transferred by USB
or network. Magnification to 100x. |
CNTech
metrology cleanroom |
|
Quinn
Leonard |
| |
Nikon |
Optical
microscope |
Quinn’s
office at CNTech |
|
Quinn
Leonard |
 |
Free-arm
microscope |
|
CNTech
beamline cleanroom |
|
Quinn
Leonard |
| |
Yellow
light |
Particle detection lamp and box. |
CNTech beamline cleanroom |
|
Quinn
Leonard |
| |
Analysis |
Tool |
Description |
Location |
Manual |
Contact |
|
Tracor Northern EDS |
Energy-dispersive
spectroscopy system on the LEO
SEM. |
CNTech
annex cleanroom |
|
Scott
Dhuey |
| |
FTIR |
Infrared chemical bond analysis |
CNTech metrology cleanroom |
|
|
| |
Perkin-Elmer DRM |
Film thickness dissoluation rate tool |
CNTech metrology cleanroom |
|
Quinn Leonard |
| |
Rudolph |
Elipsometer |
Campus - polymer lab |
|
Quinn Leonard |
| |
|
|
|
|
|
| |
|
|
|
|
|
| |
Deposition |
Tool |
Description |
Location |
Manual |
Contact |
| |
Hummer |
Metal deposition for SEM samples |
CNTech annex |
Hummer
manual
Hummer
Gold Deposition Rate |
|
| |
Au
plating cell |
Gold electroplating for x-ray mask structures |
CNTech annex |
|
Scott Dhuey |
| |
SRC
evaporator |
Metal deposition |
SCR cleanroom |
|
|
| |
InfiCon |
Measures film thickness and deposition rate during deposition |
CNTech annex/SRC cleanroom |
|
|
| |
MDC Sputterer |
Metal deposition |
CNTech annex |
|
Anphong Ho |
| |
Etch |
Tool |
Description |
Location |
Manual |
Contact |
| |
PlasmaTherrm RIE |
Reactive ion etching |
CNTech annex |
|
Scott Dhuey |
| |
Wet
processes |
|
CNTech process cleanroom |
|
|
| |
Phantom
I |
|
WCAM
plasma bay |
|
|
| |
Phantom
II |
|
WCAM
plasma bay |
|
|
| |
Minilock |
|
WCAM
plasma bay |
|
|
| |
General
Processing |
Tool |
Description |
Location |
Manual |
Contact |
| |
Wet
bench |
Processes using acids, bases and developers |
CNTech process cleanroom |
|
|
| |
Nitrogen
cabinet |
Dry, clean sample storage |
CNTech process cleanroom |
|
Quinn Leonard |
| |
Ultrasonic
bath |
Sample cleaning |
CNTech process cleanroom/annex |
|
|
| |
Analytical
scale |
Weighing materials |
CNTech process cleanroom |
|
|
| |
Handheld
DVM |
Electrical measurements |
|
|
|
| |
CEE
1000 |
Vacuum
hotplate |
CNTech process cleanroom |
|
|
| |
CEE
1000 |
Vacuum
hotplate |
CNTech process cleanroom |
|
|
| |
CEE
1100 |
Programmable
vacuum hotplate |
CNTech process cleanroom |
|
|
| |
Solitec |
Resist
spinner |
CNTech process cleanroom |
|
|
| |
Karl
Suss |
Resist
spinner |
CNTech process cleanroom |
|
|
| |
SVG/Site
Services |
Wafer
track |
CNTech process cleanroom |
|
|
| |
Semitool |
Spin-rinse
dryer, 5” |
CNTech process cleanroom |
|
|
| |
YES |
HMDS
vacuum prime oven |
CNTech process cleanroom |
|
|
| |
Verteq |
Spin-rinse
dryer, 4” |
CNTech process cleanroom |
|
|
| |
Homebuilt anodic bonding system |
Bonding silicon substrates to glass |
CNTech annex |
|
|
| |
Wally KOH
etch station |
Si etch, mostly for mask blank fabrication |
CNTech annex |
|
Quinn Leonard |
| |
Wet
bench |
Electroplating and etch cleanup |
Annex |
|
|
| |
Kenmore |
Cleanroom
laundry washer and dryer |
Annex |
|
Laurel Washa |
| |
SRC
wet bench |
|
|
|
|
| |
SRC
US baths 1 |
|
|
|
|
| |
SRC
US baths 2 |
|
|
|
|
