CHEMICAL
INFORMATION AND MSDS ARCHIVE
FOR
THE CNTECH LABORATORIES
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MSDS
(Material Safety Data Sheets) at CNTech |
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MISC: Etchants, adhesives, plating baths, etc. |
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All chemicals at CNTech can be idenrified by their CAS (Chemical Abstract Service) Registry Number. This is a unique identifier that tells you, for example, that acetone and dimethyl ketone are actually the same substance. From a safety and inventory perspective, this is a terrific idea. See http://www.cas.org/faq.html for more information. |
The Synchrotron Radiation Center (SRC) has a safety manual available on the Web. More information is available from the SRC Safety Officer, Bruce Neumann |
All chemicals at CNTech should be labeled with a hazard code chart, like the one shown below. The numbers show risks in four categories:
Red – Flammability Yellow – Reactivity White – Special precautions For a more detailed explanation of these hazard codes, start here . |
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Other
Reference Materials |
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A table of synonyms,
structures, and uses of some common lithography
molecules can be found here. |
CNTech Labs page |
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Blue – Health
This MSDS collection is under construction and may not include all chemicals found in
the CNTEch labs. For a complete listing,
see the binders of hardcopy MSDS data at the SRC operator’s desk, the SRC
Safety Officer’s office, Quinn Leonard’s office, or Laurel Washa’s office. This table is only a summary of chemical
properites; for complete and accurate information, you must consult the
original MSDS. Read the label on any chemical you plan to use.
Not all
chemicals on this list are still in the lab. We are required to keep MSDS data
on record essentially forever, but most of the chemicals on this list were
retired from use long ago. A chemical’s
presence on this list does not mean that it is available for you to use, or
that you will be exposed to it, in our labs.
Chemicals that are currently in our labs are listed in red text in the
“Locations” column. The locations listed
for each chemical may not include all
current locations, if a user has recently begun using the chemical in a new
location.
If a chemical name appears as a web link, you
can click on it to view the MSDS as a
Web page. If the Adobe icon 
appears next to
a chemical name, you can click on it to get
the MSDS as a PDF file. If there is
neither a link nor an icon, we have the MSDS in hardcopy only.
Please report any problems or inaccuracies to Quinn
Leonard.
Below this line, there’s a big table. It will load eventually. Be patient, young Grasshopper.
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ACIDS |
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FORM |
LOCATIONS |
CAS # |
SUPPLIER |
HAZARDS |
SYNONYMS |
FORMULA |
USES |
CATEGORY |
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H |
F |
R |
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98% solution |
Storage |
00064-19-7 |
JT Baker |
2 |
2 |
2 |
3 |
Ethanoic acid |
CH3COOH |
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ACID |
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Powder |
Not present |
10043-35-3 |
Fisher |
2 |
0 |
0 |
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Hydrogen borate |
H3BO3 |
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ACID |
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Powder |
Storage |
77-92-9 |
Fisher |
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C6H8O7 |
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ACID |
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50% solution |
Not present |
16872-11-0 |
Fisher |
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HBF4 |
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ACID |
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48% solution |
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Mallinckrodt |
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HBr |
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ACID |
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35% solution |
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HCl |
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ACID |
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50% solution |
Cleanroom |
7664-39-3 |
Fisher |
4 |
0 |
1 |
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HF |
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ACID |
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Solution |
Cleanroom |
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Component of KTI Cr etch |
HNO3 |
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ACID |
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85% solution |
Cleanroom |
10294-56-1 |
Fisher |
2 |
0 |
0 |
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H3PO3 |
Epoxy remover |
ACID |
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Crystals |
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ACID |
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98% solution |
Cleanroom |
7664-93-9 |
Fisher |
3 |
0 |
2 |
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H2SO4 |
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ACID |
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Storage |
4282-29-5 |
Fisher |
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Hydrogen sulfate |
C6H4O4S |
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ACID |
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Storage |
21080-92-2 |
Fisher |
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ACID |
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Trifluoromethanesulfonic acid |
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ACID |
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ACID |
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ACID |
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BASES |
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FORM |
LOCATIONS |
CAS # |
SUPPLIER |
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SYNONYMS |
FORMULA |
USE |
CATEGORY |
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H |
F |
R |
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Solution |
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Piranha etch |
BASE |
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45% Solution |
Cleanroom; annex |
1310-58-3 |
Fisher |
3 |
0 |
1 |
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Si etch |
KOH |
Si etch |
BASE |
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Potassium hydroxide pellets |
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Cleanroom |
75-59-2 |
Olin |
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TMAH |
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BASE |
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BASE |
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BASE |
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BASE |
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BASE |
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DEVELOPERS |
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FORM |
LOCATIONS |
CAS # |
SUPPLIER |
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SYNONYMS |
COMPONENTS |
USE |
CATEGORY |
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H |
F |
R |
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AZ 400 K |
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Hoechst |
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TMAH, surfactants |
CAR developer |
DEVELOPER, AQUEOUS |
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HPRD 402, 419, 435 |
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Not present |
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Olin Hunt |
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TMAH, surfactants |
Positive resist developer |
DEVELOPER, AQUEOUS |
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KT1 |
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DEVELOPER, AQUEOUS |
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LDD-26W |
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DEVELOPER, AQUEOUS |
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LSI |
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DEVELOPER, AQUEOUS |
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Cleanroom |
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TMAH, surfactants |
CAR developer |
DEVELOPER, AQUEOUS |
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MF 312 |
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Cleanroom |
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CAR developer |
DEVELOPER, AQUEOUS |
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MF 319 |
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Cleanroom |
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CAR developer |
DEVELOPER, AQUEOUS |
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MF 320 |
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Cleanroom |
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CAR developer |
DEVELOPER, AQUEOUS |
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MF 321 |
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Cleanroom |
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CAR developer |
DEVELOPER, AQUEOUS |
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MF702 |
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Cleanroom |
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CAR developer |
DEVELOPER, AQUEOUS |
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MFT 21 Track developer |
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DEVELOPER, AQUEOUS |
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Microposit 352 |
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DEVELOPER, AQUEOUS |
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Microposit 455 |
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DEVELOPER, AQUEOUS |
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Microposit 2401 |
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DEVELOPER, AQUEOUS |
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Microposit developer concentrate |
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MF 312 ? |
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DEVELOPER, AQUEOUS |
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NMD-3 |
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DEVELOPER, ORGANIC |
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OPD-4130 |
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DEVELOPER |
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RN134 |
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DEVELOPER |
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SU-8 Developer |
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XP SU-8 developer; PGMEA |
PGMEA |
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DEVELOPER, ORGANIC |
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Cleanroom |
75-59-2 |
Olin |
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TMAH |
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DEVELOPER, AQUEOUS |
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XP SU-8 Developer |
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SU-8 Developer; PGMEA |
PGMEA |
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DEVELOPER, ORGANIC |
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Cleanroom |
628-63-7 |
Zeon Chemicals |
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n-Amyl acetate |
ZEP developer |
DEVELOPER, ORGANIC |
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DEVELOPER, AQUEOUS |
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DEVELOPER, AQUEOUS |
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DEVELOPER, AQUEOUS |
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DEVELOPER, AQUEOUS |
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EQUIPMENT
OILS AND FLUIDS, CLEANERS, ETC. |
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FORM |
LOCATIONS |
CAS # |
SUPPLIER |
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SYNONYMS |
COMPONENTS |
USES |
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H |
F |
R |
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Latex |
Gloves |
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Oakite |
Liquid |
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Liquid |
WCAM |
107-21-1 |
Dow-Therm |
1 |
1 |
0 |
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Ethylene glycol |
Julabo coolant |
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VacSeal |
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Vinyl |
Gloves |
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GASES |
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FORM |
LOCATIONS |
CAS # |
SUPPLIER |
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SYNONYMS |
COMPONENTS |
USES |
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H |
F |
R |
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Gas |
Throughout the lab |
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Gas |
Annex – RIE and Hummer |
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Gas |
Not present |
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Gas |
Vault - ES-1 |
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Gas |
Annex |
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Gas |
Annex |
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Gas |
Annex |
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Tech Duster |
Gas |
Annex |
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Gas |
Annex |
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MISC: Etchants,
plating baths, |
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indicators,
adhesion promotors, |
FORM |
LOCATIONS |
CAS # |
SUPPLIER |
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SYNONYMS |
COMPONENTS |
USES |
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epoxy |
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H |
F |
R |
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30631-2 |
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Aldrich |
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HQ & MEHQ inhibitor remover |
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309 Brightener |
Liquid |
Annex wet bench |
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Sel-Rex |
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Neutronix brightener |
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Au plating bath brightener |
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309 Conducting Salt |
Crystal |
Annex wet bench |
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Sel-Rex |
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Neutronix salts |
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309 Make Up |
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Annex wet bench |
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Sel-Rex |
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Neutronix Make Up |
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309 Replenisher A |
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Annex wet bench |
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Sel-Rex |
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Neutronix Replenisher A |
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309 Replenisher B |
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Annex wet bench |
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Sel-Rex |
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Neutronix Replenisher B |
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BDT 510 Make-up |
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Annex wet bench |
7732-18-5 |
Sel-Rex |
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> 85% water |
Au plating bath |
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BDT 510 Replenisher |
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Annex wet bench |
7732-18-5 |
Sel-Rex |
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> 80% water |
Au plating bath |
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Bromcresol G-methyl Red |
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Cleanroom |
67-63-0 |
Fisher |
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> 85% IPA |
Titration indicator |
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Chrome etch |
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Cleanroom |
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KTI |
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KTI chrome etch |
Nitric acid; cerrium ammonium nitrate |
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Congo red |
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Epoxy (Tra-Bond 2115 hardener) |
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Cleanroom |
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Tra-Con |
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Tra-Bond epoxy |
Aliphatic polyamine |
X-ray mask bonding |
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Iron plating bath |
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FOX(R)-15 flowable oxide |
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Cleanroom |
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Graphite, colloidal |
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Annex SEM room |
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Ted Pella |
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Graphite in isopropyl alcohol |
SEM sample grounding |
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Hexamethyl disilazane |
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Cleanroom |
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HMDS |
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Adhesion promotor |
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HMDS |
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Cleanroom |
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Hexamethyl disilazane |
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Adhesion promotor |
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Iron plating bath |
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KTI chrome etch |
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Cleanroom |
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KTI |
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Chrome etch |
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MS-487 conductive coating |
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Nanostrip |
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Solution |
Cleanroom; annex |
1310-58-3 |
Fisher |
3 |
0 |
1 |
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Si etch |
KOH |
Si etch |
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Si etch |
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Cleanroom; annex |
1310-58-3 |
Fisher |
3 |
0 |
1 |
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Potassium hydroxide |
KOH |
Si etch |
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Summa clean |
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Tantalum silicide etch |
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Tra-Bond epoxy |
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Cleanroom |
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Tra-Con |
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Epoxy 2115 |
Aliphatic polyamine |
X-ray mask bonding |
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INORGANIC
COMPOUNDS |
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FORM |
LOCATIONS |
CAS # |
SUPPLIER |
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SYNONYMS |
FORUMULA |
USE |
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H |
F |
R |
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Aluminum fluoride hydrate |
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32287-65-3 |
Aldrich |
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Aluminum trifluoride |
ALF3 |
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Ammonium carbonate |
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506-87-6 |
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3 |
0 |
1 |
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Crystal ammonia |
CH8N2O3 |
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Ammonium fluoride |
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12125-01-8 |
Fisher |
3 |
0 |
0 |
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NH4F |
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Ammonium hydroxide |
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Cleanroom |
1336-21-6 |
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Ammonium hydrate |
NH3OH |
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7784-30-7 |
Fisher |
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AlPO4 |
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Calcium chloride |
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Calcium hydroxide |
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7778-18-9 |
Fisher |
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CaSO4 |
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Cerium ammonium nitrate |
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Cleanroom |
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KTI |
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Component of KTI Cr etch |
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123333-60-8 |
Fisher |
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Ceric Sulfate Hydrate |
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Iron plating bath |
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Conductive salt |
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Cleanroom |
7553-56-2 |
Mallinckrodt |
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